Self-Contained, Optical Leak Detector

The HPQ-D leak detection sensor family is the first of its kind to be constructed entirely of sealed, Teflon(r) PFA material and be configured in a self-contained package smaller than a quarter. It does not require a fiberoptic amplifier to be used since there is a useable NPN or PNP transistor output with each sensor. Typically, only 1ml of liquid in contact with the optical focal point will change the sensor's output. This enables early detection of caustic chemical spills and can be used to shut down the tool immediately, which minimizes the environmental impact.

A large gain signal difference between no liquid and liquid detection ensures low probability of false detection. The fail safe design provides a normally closed output that turns off when liquid is detected.

Easily viewable green LED signifies normal operation and an orange LED turns on when liquid is detected and output is shut off. The bracket assembly is made of CPVC material and has an over/under patented style that assures solid retention once locked down and the ability to remove the sensor for maintenance or output checking.

The underside of bracket is flat and has perforated mounting holes so you can mount with hardware or adhesive.

Features and Benefits

• Sealed, Chemically Resistant Materials - 13mm circular sensor pancake lays on bottom of semiconductor wet process tool and detects liquid leak or spill by refraction light principle (see illustration on this page).
  
• Body is Teflon(r) PFA material with IP67 sealing and the mounting bracket assembly is CPVC.
  
• 2 meters of PFA covers the sensing end of the electrical cable.
  
• Quick Detection Minimizes Environmental Impact and Messy Cleanup - Typically, 1ml of liquid contact with the optical focal point will trigger the signal change.
  
• Fail Safe Design - Output current is conducted in normal dry conditions and will turn off in the presence of liquid.
  
• The sensor can be used with any pan material color.
  
• UL508 and CE approval by end of 2002.
  
• UL991 evaluation report based on applicable SEMI S2 Standards will also be available.
  
• PNP and NPN output versions are available.
  
• Condition Indication Using Easy-to-View LED's - Green LED indicates normal dry condition and proper operation, orange LED indicates when liquid is detected or operation is stopped.
  
• Low Initial and Operational Cost - The HPQ-D series is priced very aggressively and will require little maintenance unlike other prevailing technologies.